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Mechanical properties of anodic aluminum oxide for microelectromechanical system applications

Bibliographic reference Moreno Hagelsieb, Luis ; Flandre, Denis ; Raskin, Jean-Pierre. Mechanical properties of anodic aluminum oxide for microelectromechanical system applications.15th Workshop on Dielectrics in Microelectronics (WoDiM 2008) (Bad Saarow (Germany), du 23/06/2008 au 25/06/2008). In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, Vol. 27, no. 1, p. 542-546 (2009)In: Proceedings of the 15th Workshop on Dielectrics in Microelectronics (WoDiM 2008), A V S Amer Inst Physics : Melville2009
Permanent URL http://hdl.handle.net/2078.1/58966