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Grain-size and Resistivity of Lpcvd Polycrystalline Silicon Films

Bibliographic reference Colinge, JP. ; Demoulin, E. ; Delannay, Francis ; Lobet, M. ; Temerson, JM.. Grain-size and Resistivity of Lpcvd Polycrystalline Silicon Films. In: Journal of the Electrochemical Society, Vol. 128, no. 9, p. 2009-2014 (1981)
Permanent URL http://hdl.handle.net/2078.1/58033