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Comparative-study of Nb and Tiw Barrier Layers Between Au and A-sio2

Bibliographic reference Liehr, M. ; Delrue, JP. ; Caudano, Roland ; Herbots, N. ; Vandenberghe, RAL. ; et. al. Comparative-study of Nb and Tiw Barrier Layers Between Au and A-sio2. In: Journal of Vacuum Science and Technology. Part A. Vacuum, Surfaces and Films, Vol. 2, no. 2, p. 288-291 (1984)
Permanent URL http://hdl.handle.net/2078.1/56358