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Rbs Study of the Effect of Arsenic and Phosphorus Interfacial Segregation Upon the Sintering of Contacts Between Implanted Polycrystalline Silicon and Aluminum-silicon(1-percent)

Bibliographic reference Herbots, N. ; Lobet, M. ; Vandewiele, F.. Rbs Study of the Effect of Arsenic and Phosphorus Interfacial Segregation Upon the Sintering of Contacts Between Implanted Polycrystalline Silicon and Aluminum-silicon(1-percent). In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 7-8, no. MAR, p. 278-286 (1985)
Permanent URL http://hdl.handle.net/2078.1/55320