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The Effect of Nitrogen Incorporation On the Thermal-stability of Tiw/al Metallization

Bibliographic reference Gloesener, D. ; Puylaert, G. ; Vandewiele, F.. The Effect of Nitrogen Incorporation On the Thermal-stability of Tiw/al Metallization. In: Le Vide: Science, Technique et Applications, Vol. 42, no. 236, p. 175-177 (1987)
Permanent URL http://hdl.handle.net/2078.1/53822