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Study of the Sputter Rate of Thin Aluminum Layers Deposited On Polymer (pet) Substrates

Bibliographic reference Depuydt, Y. ; Bertrand, Patrick. Study of the Sputter Rate of Thin Aluminum Layers Deposited On Polymer (pet) Substrates. In: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, Vol. 39, no. 1-4, p. 86-90 (1989)
Permanent URL http://hdl.handle.net/2078.1/52521