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Nondestructive Characterization of Soi Wafers Using Spectroscopic Reflectometry
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Document type | Article de périodique (Journal article) |
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Access type | Accès restreint |
Publication date | 1993 |
Language | Anglais |
Journal information | "Solid-State Electronics" - Vol. 36, no. 8, p. 1213-1216 (1993) |
Peer reviewed | yes |
Publisher | Pergamon-elsevier Science Ltd (Oxford) |
issn | 0038-1101 |
e-issn | 1879-2405 |
Affiliation | UCL |
Links |
Bibliographic reference | Smeys, P. ; Magnusson, U. ; Colinge, JP.. Nondestructive Characterization of Soi Wafers Using Spectroscopic Reflectometry. In: Solid-State Electronics, Vol. 36, no. 8, p. 1213-1216 (1993) |
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Permanent URL | http://hdl.handle.net/2078.1/49640 |