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Nondestructive Characterization of Soi Wafers Using Spectroscopic Reflectometry

Bibliographic reference Smeys, P. ; Magnusson, U. ; Colinge, JP.. Nondestructive Characterization of Soi Wafers Using Spectroscopic Reflectometry. In: Solid-State Electronics, Vol. 36, no. 8, p. 1213-1216 (1993)
Permanent URL http://hdl.handle.net/2078.1/49640