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Characterization of a boro-silicon oxynitride prepared by thermal nitridation of a polyborosiloxane

Bibliographic reference Bois, L. ; Lharidon, P. ; Laurent, Y. ; Gouin, X. ; Grange, Paul ; et. al. Characterization of a boro-silicon oxynitride prepared by thermal nitridation of a polyborosiloxane. In: Journal of Alloys and Compounds, Vol. 232, no. 1-2, p. 244-253 (1996)
Permanent URL http://hdl.handle.net/2078.1/47376