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A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

Bibliographic reference Travaly, Y. ; Schuhmacher, J ; Baklanov, MR ; Giangrandi, S ; Richard, O ; et. al. A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates. In: Journal of Applied Physics, Vol. 98, no. 8 (2005)
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