User menu

Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon

Bibliographic reference Eyben, Pierre ; Clemente, Francesca ; Vanstreels, Kris ; Pourtois, Geoffrey ; Clarysse, Trudo ; et. al. Analysis and modeling of the high vacuum scanning spreading resistance microscopy nanocontact on silicon. In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, Vol. 28, no. 2, p. 401-406 (2010)
Permanent URL http://hdl.handle.net/2078.1/33989