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High performance silicon-based substrate using buried PN junctions towards RF applications

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Bibliographic reference Moulin, Maxime ; Rack, Martin ; Fache, Thibaud ; Chalupa, Zdenek ; Plantier, Christophe ; et. al. High performance silicon-based substrate using buried PN junctions towards RF applications.2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) (Caen, France, du 1/9/2021 au 3/9/2021). In: Proceedings, 2021, p. 1-4
Permanent URL http://hdl.handle.net/2078.1/269407