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Novel parametric-effect MEMS amplifiers/transducers

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Brown, A. Raskin, Jean-Pierre [UCL] Khuri-Yakub, B. T. Rebeiz, G. M.

(eng) A parametric effect amplifier has been built at 200 kHz (input) and 1.84 MHz (output) using a MEMS time-varying capacitor. The capacitor is composed of a thin low stress metallized silicon-nitride diaphragm and is pumped by a large signal voltage at 1.64 MHz. This results in a large change in the capacitance, and parametric amplification of an input signal at 200 kHz. To our knowledge, this device is the first-ever mechanical up-converter parametric-effect amplifier, with an up-conversion ratio of 9:1.

Document type Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection
Access type Accès libre
Publication date 2000
Language Anglais
Conference "Solid-State Sensor and Actuator Workshop", Hilton Head Island, South Carolina (USA) (du 04/06/2000 au 08/06/2000)
Peer reviewed yes
Publication status Publié
Affiliation UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
Links
Bibliographic reference Brown, A. ; Raskin, Jean-Pierre ; Khuri-Yakub, B. T. ; Rebeiz, G. M.. Novel parametric-effect MEMS amplifiers/transducers.Solid-State Sensor and Actuator Workshop (Hilton Head Island, South Carolina (USA), du 04/06/2000 au 08/06/2000).
Permanent URL http://hdl.handle.net/2078.1/240312