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Development, characterisation and simulation of wafer bonded Si-on-SiC substrates

Bibliographic reference Gammon, P.M. ; Chan, C.W. ; Li, F. ; Gity, F. ; Trajkovic, T. ; et. al. Development, characterisation and simulation of wafer bonded Si-on-SiC substrates. In: Materials Science in Semiconductor Processing, , p. 6 (2017)
Permanent URL http://hdl.handle.net/2078.1/191120