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Internal stress and opto-electronic properties of ZnO thin films deposited by reactive sputtering in various oxygen partial pressures

Bibliographic reference Tuyaerts, Romain ; Poncelet, Olivier ; Raskin, Jean-Pierre ; Proost, Joris. Internal stress and opto-electronic properties of ZnO thin films deposited by reactive sputtering in various oxygen partial pressures. In: Journal of Applied Physics, Vol. 122, no.15, p. 155306 (2017)
Permanent URL http://hdl.handle.net/2078.1/188505
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