User menu

On-chip MEMS-based internal stress actuated structures for the mechanical testing of freestanding thin film materials

Bibliographic reference Vayrette, Renaud ; Coulombier, Michaël ; Pardoen, Thomas ; Raskin, Jean-Pierre. On-chip MEMS-based internal stress actuated structures for the mechanical testing of freestanding thin film materials. In: Advanced Materials Research, Vol. 996, p. 833-840 (August 2014)
Permanent URL http://hdl.handle.net/2078.1/187257