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A MEMS-based magnetic field sensor with simple resonant structure and linear electrical response

Bibliographic reference Herrera-May, A.L. ; Lara-Castro, M. ; Lopez-Huerta, F. ; Gkotsis, Petros ; Raskin, Jean-Pierre ; et. al. A MEMS-based magnetic field sensor with simple resonant structure and linear electrical response. In: Microelectronic Engineering, Vol. 142, p. 12-21 (July 2015)
Permanent URL http://hdl.handle.net/2078.1/187247