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Mechanical characterization and modelling of Lorentz force based MEMS magnetic field sensors

Bibliographic reference Gkotsis, Petros ; Castro, Lara ; Lopez-Huerta, F. ; Herrera-May, A.L. ; Raskin, Jean-Pierre. Mechanical characterization and modelling of Lorentz force based MEMS magnetic field sensors. In: Solid-State Electronics, Vol. 112, no.Special Issue EuroSOI’14, p. 68-77 (October 2015)
Permanent URL http://hdl.handle.net/2078.1/187245