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Extraction method for the residual stress in multilayer micro-plates under large deflection based on static deflection analysis

Bibliographic reference Changizi, Amin ; Stiharu, Ion ; Olbrechts, Benoit ; Raskin, Jean-Pierre. Extraction method for the residual stress in multilayer micro-plates under large deflection based on static deflection analysis. In: IEEE Jounal of Microelectromechanical Systems, Vol. 24, no.4, p. 1150-1163 (August 2015)
Permanent URL http://hdl.handle.net/2078.1/187243