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HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers

Bibliographic reference van Niftrik, A. T. J. ; Schermer, J. J. ; Bauhuis, G. J. ; Mulder, P. ; Larsen, P. K. ; et. al. HF Species and Dissolved Oxygen on the Epitaxial Lift-Off Process of GaAs Using AlAsP Release Layers. In: Journal of the Electrochemical Society, Vol. 155, no.1, p. D35 (2008)
Permanent URL http://hdl.handle.net/2078.1/181054
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