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Mechanical behavior of ultrathin sputter deposited porous amorphous Al2O3 films

Bibliographic reference van der Rest, Astrid ; Idrissi, Hosni ; Henry, Frédéric ; Favache, Audrey ; Schryvers, Dominique ; et. al. Mechanical behavior of ultrathin sputter deposited porous amorphous Al2O3 films. In: Acta Materialia, Vol. 125, p. 27-37 (2017)
Permanent URL http://hdl.handle.net/2078.1/178823