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CMOS integrated poly-sigemems accelerometer above 0.18 µm technology

Bibliographic reference Ray Chaudhuri, Ashesh ; Helin, P. ; van den Hoven, R. ; Severi, S. ; Rottenberg, X. ; et. al. CMOS integrated poly-sigemems accelerometer above 0.18 µm technology.2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (Anchorage (USA), du 21/06/2015 au 25/06/2015).
Permanent URL http://hdl.handle.net/2078.1/176116