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Live demonstration: Microsystem integration of a palladium-based MEMS hydrogen gas sensor

Bibliographic reference Walewyns, Thomas ; Emmerechts, Carl ; Gérard, Pierre ; André, Nicolas ; Francis, Laurent. Live demonstration: Microsystem integration of a palladium-based MEMS hydrogen gas sensor.2015 IEEE Sensors (Busan (South Korea), du 01/11/2015 au 04/11/2015).
Permanent URL http://hdl.handle.net/2078.1/176065