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A highly selective MEMS transducer for hydrogen sensing based on stress modification in palladium thin films

Bibliographic reference Walewyns, Thomas ; Emmerechts, Carl ; Gérard, Pierre ; André, Nicolas ; Francis, Laurent. A highly selective MEMS transducer for hydrogen sensing based on stress modification in palladium thin films.2015 IEEE Sensors (Busan (South Korea), du 01/11/2015 au 04/11/2015).
Permanent URL http://hdl.handle.net/2078.1/176064