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A resonant microstructure tunability analysis for an out-of-plane capacitive detection MEMS magnetometer

Bibliographic reference Hadj Said, Mohamed ; Tounsi, Farès ; Gkotsis, Petros ; Mezghani, Brahim ; Francis, Laurent. A resonant microstructure tunability analysis for an out-of-plane capacitive detection MEMS magnetometer. In: B.Michel, B.Bhushan, Micro- and Nanosystems Information Storage and processing Systems, Springer-Verlag  : Berlin Heidelberg 2016, p. 19
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