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Direct silicon bonding dynamics: a coupled fluid/structure analysis

Bibliographic reference Navarro, Etienne ; Bréchet, Yves ; Moreau, R. ; Pardoen, Thomas ; Raskin, Jean-Pierre ; et. al. Direct silicon bonding dynamics: a coupled fluid/structure analysis.WaferBond'13 (Stockhom, Suède, du 05/12/2013 au 06/12/2013). In: Proceedings of WaferBond'13, 2013
Permanent URL http://hdl.handle.net/2078.1/173213