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On-chip MEMS-based internal stress actuated structures for the mechanical testing of freestanding thin film materials

Bibliographic reference Vayrette, Renaud ; Coulombier, Michaël ; Pardoen, Thomas ; Raskin, Jean-Pierre. On-chip MEMS-based internal stress actuated structures for the mechanical testing of freestanding thin film materials.9th European Conference on Residual Stress (Troyes, France, du 07/07/2014 au 10/07/2014). In: Proceedings of the 9th European Conference on Residual Stress, 2014
Permanent URL http://hdl.handle.net/2078.1/173208