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Design, fabrication and integration of a palladium-based ultra-low power MEMS hydrogen sensor

Bibliographic reference Walewyns, Thomas ; Spirito, David ; Gérard, Pierre ; Emmerechts, Carl ; Stoukatch, Serguei ; et. al. Design, fabrication and integration of a palladium-based ultra-low power MEMS hydrogen sensor.UMI 3462-LN2 Colloque 2014 (Allevard-les-Bains (France), du 09/07/2014 au 10/07/2014).
Permanent URL http://hdl.handle.net/2078.1/156237