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Effects of laser operating parameters on piezoelectric substrate micromachining with picosecond laser

Bibliographic reference El Fissi, Lamia ; Xhurdebise, Victor ; Francis, Laurent. Effects of laser operating parameters on piezoelectric substrate micromachining with picosecond laser. In: Micromachines, Vol. 6, p. 19-31 (23/12/2014)
Permanent URL http://hdl.handle.net/2078.1/155640
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