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A Tunable Palladium-Based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-Low Power Sensing

Bibliographic reference Walewyns, Thomas ; Spirito, David ; Francis, Laurent. A Tunable Palladium-Based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-Low Power Sensing. In: Procedia Engineering, Vol. 87, p. 268-271 (31/12/2014)
Permanent URL http://hdl.handle.net/2078.1/155153