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Fabrication method of MEMS based Clamped-Clamped resonant magnetometer

Bibliographic reference Ghalehbeygi, O.T. ; Trabzon, L. ; Francis, Laurent ; Kizil, H.. Fabrication method of MEMS based Clamped-Clamped resonant magnetometer.1st International Conference on Science and Engineering Materials (ICoSEM 2013) (Kuala Lumpur (Malaysia), du 13/11/2013 au 14/11/2013). In: Advances Materials Research, Vol. 970, no.6, p. 106-110 (2014)
Permanent URL http://hdl.handle.net/2078.1/152788