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A Silicon-on-Insulator Platform Functionalized By Atomic Layer Deposition for Humidity Sensing

Bibliographic reference André, Nicolas ; Pollissard, Guillaume ; Couniot, Numa ; Gérard, Pierre ; Ali, Z.S. ; et. al. A Silicon-on-Insulator Platform Functionalized By Atomic Layer Deposition for Humidity Sensing.International Meeting on New Sensing Technologies and Modelling for Air-Pollution Monitoring (Aveiro (Portugal), du 14/10/2014 au 15/10/2014).
Permanent URL http://hdl.handle.net/2078.1/152096