User menu

A silicon-on-insulator (SOI) platform functionalized by atomic layer deposition (ALD) for humidity sensing

Bibliographic reference André, Nicolas ; Pollissard, Guillaume ; Couniot, Numa ; Gérard, Pierre ; Ali, Z.S. ; et. al. A silicon-on-insulator (SOI) platform functionalized by atomic layer deposition (ALD) for humidity sensing.International Meeting on New Sensing Technologies and Modelling for Air-Pollution Monitoring (Aveiro (Portugal), du 14/10/2014 au 15/10/2014).
Permanent URL http://hdl.handle.net/2078.1/152095