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Deposition of a SiOx Film Showing Enhanced Surface Passivation

Bibliographic reference Descamps, Pierre ; Asad, Salman Syed ; Kaiser, Vincent ; Campeol, Frederik ; Kuzma-Filipek, Izabela ; et. al. Deposition of a SiOx Film Showing Enhanced Surface Passivation. In: Energy Procedia, Vol. 55, p. 769–776 (2014)
Permanent URL http://hdl.handle.net/2078.1/152029