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Influence of the bonding front propagation on the wafer stack curvature

Bibliographic reference Navarro, E. ; Bréchet, Y. ; Barthelemy, A. ; Radu, I. ; Pardoen, Thomas ; et. al. Influence of the bonding front propagation on the wafer stack curvature. In: Applied Physics Letters, Vol. 105, no.6, p. 061908 (2014)
Permanent URL http://hdl.handle.net/2078.1/151920
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