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Simulation of low-temperature, atmospheric-pressure plasma enhanced chemical vapor deposition reactors

Bibliographic reference Lorant, Christophe ; Descamps, Pierre ; De Wilde, Juray. Simulation of low-temperature, atmospheric-pressure plasma enhanced chemical vapor deposition reactors. 1st BeLux workshop on “Coating, Materials, surfaces and Interfaces (Luxembourg, du 11/09/2014 au 12/09/2014).
Permanent URL http://hdl.handle.net/2078.1/150611