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Mechanical behavior of ultrathin aluminum oxide films: Influence of open or closed porosity

Bibliographic reference van der Rest, Astrid ; Henry, Frederic ; Proost, Joris ; Van Overmeere, Quentin ; Pardoen, Thomas. Mechanical behavior of ultrathin aluminum oxide films: Influence of open or closed porosity.Gordon Research Conference on Thin Film & Small Scale Mechanical Behavior (Waltham, MA (USA), du 13/07/2014 au 18/07/2014).
Permanent URL http://hdl.handle.net/2078.1/145296