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Chemically resistant encapsulant to enable a novel MEMS fabrication process

Bibliographic reference Stoukatch, Sergei ; Walewyns, Thomas ; Tooten, Ester ; Axisa, Fabrice ; Francis, Laurent ; et. al. Chemically resistant encapsulant to enable a novel MEMS fabrication process.2013 European Microelectronics Packaging Conference (Grenoble (France), du 09/09/2013 au 12/09/2013).
Permanent URL http://hdl.handle.net/2078.1/141585