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Ultra-Narrow, High Aspect Ratio Trenches for Use in Miniaturized Poly-Sige Accelerometers

Bibliographic reference Ray Chaudhuri, Ashesh ; Helin, P. ; Severi, S. ; Van Hoof, R. ; Du Bois, B. ; et. al. Ultra-Narrow, High Aspect Ratio Trenches for Use in Miniaturized Poly-Sige Accelerometers.224th ECS Meeting (San Francisco (USA), du 27/10/2013 au 01/11/2013).
Permanent URL http://hdl.handle.net/2078.1/141583