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On-chip testing and characterization of polysilicon thin films fracture mechanisms

Bibliographic reference Vayrette, Renaud ; Galceran, Montserrat ; Godet, Stéphane ; Raskin, Jean-Pierre ; Pardoen, Thomas. On-chip testing and characterization of polysilicon thin films fracture mechanisms.MRS Fall Meeting and Exhibit (Boston, USA, du 01/12/2013 au 06/02/2014).
Permanent URL http://hdl.handle.net/2078.1/140433