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Self-formation of sub-10 nm nanogaps based on silicidation

Bibliographic reference Tang, Xiaohui ; Francis, Laurent ; Dutu, Constantin Augustin ; Reckinger, Nicolas ; Raskin, Jean-Pierre. Self-formation of sub-10 nm nanogaps based on silicidation. In: Nanotechnology, Vol. 25, no.115201, p. 115201-1/9 (24/02/2014)
Permanent URL http://hdl.handle.net/2078.1/140305