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Mechanical Characterization and Modelling of Lorentz Force Based MEMS Magnetic Field Sensors

Bibliographic reference Gkotsis, Petros ; Raskin, Jean-Pierre ; et. al. Mechanical Characterization and Modelling of Lorentz Force Based MEMS Magnetic Field Sensors.EUROSOI2014 (Tarragona, du 27/01/2014 au 29/01/2014).
Permanent URL http://hdl.handle.net/2078.1/139025