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Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

Bibliographic reference André, Nicolas ; Rue, Bertrand ; Scheen, Gilles ; Flandre, Denis ; Francis, Laurent ; et. al. Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology. In: Sensors and Actuators A: Physical, Vol. 206, p. 67-74 (16/11/2013)
Permanent URL http://hdl.handle.net/2078.1/136019