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Internal stresses in ultrathin oxide flms: influence on growth and reliability

Bibliographic reference Van Overmeere, Quentin. Internal stresses in ultrathin oxide flms: influence on growth and reliability.224th Meeting of the Electrochemical Society, Symposium on Oxide Films (San Francisco, USA, du 27/10/2013 au 01/11/2013). In: ECS Meeting Abstracts, 2013
Permanent URL http://hdl.handle.net/2078.1/135603