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A method to determine the elastic properties and the residual stress in the functional films of microcantilever gas sensors

Bibliographic reference Gkotsis, Petros ; Zeb, Gul ; Pardoen, Thomas ; Raskin, Jean-Pierre. A method to determine the elastic properties and the residual stress in the functional films of microcantilever gas sensors.Proceedings of 2013 Nanomechanical Sensing Workshop (Stanford CA, du 01/05/2013 au 03/05/2013).
Permanent URL http://hdl.handle.net/2078.1/135310