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Issues associated to rare earth silicide integration in ultra thin FD SOI Schottky barrier nMOSFETs

Bibliographic reference Larrieu, Guilhem ; Yarekha, Dmytro A. ; Dubois, Emmanuel ; Breil, Nicolas ; Reckinger, Nicolas ; et. al. Issues associated to rare earth silicide integration in ultra thin FD SOI Schottky barrier nMOSFETs.Meeting of the Electrochemical Society 2009 (San Francisco (USA), du 24/05/2009 au 29/05/2009).
Permanent URL http://hdl.handle.net/2078.1/135228