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TEM Characterization of Polysilicon and Silicide Fin Fabrication Processes of FinFETs

Bibliographic reference Ratajczak, J. ; Laszcz, A. ; Czerwinski, A. ; Katcki, J. ; Tang, Xiaohui ; et. al. TEM Characterization of Polysilicon and Silicide Fin Fabrication Processes of FinFETs. In: Acta Physica Polonica. Series A: General Physics, Physics of Condensed Matter, Optics and Quantum Electronics, Atomic and Molecular Physics, Applied Physics, Vol. 116, no.98, p. 89-91 (2009)
Permanent URL http://hdl.handle.net/2078.1/135211