User menu

Fabrication of SOI nano devices

Bibliographic reference Tang, Xiaohui ; Reckinger, Nicolas ; Bayot, Vincent. Fabrication of SOI nano devices. In: D.Flandre, A.N.Nazarov, P.L.F.Hemment, Science and Technology of Semiconductor-on-Insulator Structures and Devices Operating in a Harsh Environment, Kluwer Academic Publishers  : Doordrecht (the netherlands) 2005, p. 333-344
Permanent URL http://hdl.handle.net/2078.1/135192