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SOI nano device fabrication

Bibliographic reference Tang, Xiaohui ; Reckinger, Nicolas ; Bayot, Vincent. SOI nano device fabrication.NATO Advanced Research Workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment 2004 (Kiev (Ukraine), du 26/04/2004 au 30/04/2004). In: Proceedings of the NATO Advanced Research Workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment 2004, 2004
Permanent URL http://hdl.handle.net/2078.1/135126