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Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate

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Laszcz, A. [Institute of Electron Technology, Warsaw] Jatcki, J. [Institute of Electron Technology, Warsaw] Ratajczak, J. [Institute of Electron Technology, Warsaw] Tang, Xiaohui [UCL] Dubois, Emmanuel [IEMN, France]
Document type Communication à un colloque (Conference Paper) – Présentation orale avec comité de sélection
Publication date 2005
Language Anglais
Conference "XII International Conference on Electron Microscopy of Solids", Kazimierz Dolny (Poland) (du 0/06/2005 au 09/06/2005)
Peer reviewed yes
Host document
Affiliation UCL - FSA/ELEC - Département d'électricité
Keywords SOI ; Silicon-on-insulator
Links
Bibliographic reference Laszcz, A. ; Jatcki, J. ; Ratajczak, J. ; Tang, Xiaohui ; Dubois, Emmanuel. Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate.XII International Conference on Electron Microscopy of Solids (Kazimierz Dolny (Poland), du 0/06/2005 au 09/06/2005).
Permanent URL http://hdl.handle.net/2078.1/135112