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Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate

Bibliographic reference Laszcz, A. ; Jatcki, J. ; Ratajczak, J. ; Tang, Xiaohui ; Dubois, Emmanuel. Transmission electron microscopy study of erbium silicide formation using a Pt/Er stack on a thin silicon-on-insulator substrate.XII International Conference on Electron Microscopy of Solids (Kazimierz Dolny (Poland), du 0/06/2005 au 09/06/2005).
Permanent URL http://hdl.handle.net/2078.1/135112