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Direct silicon bonding dynamics: A coupled fluid/structure analysis

Bibliographic reference Navarro, E. ; Bréchet, Y. ; Moreau, R. ; Pardoen, Thomas ; Raskin, Jean-Pierre ; et. al. Direct silicon bonding dynamics: A coupled fluid/structure analysis. In: Applied Physics Letters, Vol. 103, no.3, p. 034104 (2013)
Permanent URL http://hdl.handle.net/2078.1/134944
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